Hologram Wafer

Cutting-Edge Solutions for Semiconductor Manufacturing

OUR PRODUCTS

Explore Milara Inc.’s comprehensive range of wafer handling and automation products, designed to meet the highest standards of precision and efficiency in the semiconductor industry. From smart prealigners to advanced wafer handling robots, our products are engineered to enhance your manufacturing process with innovative technology and unmatched reliability.

Hologram EFEM 300mm
hologram base
hologram base
H3 Robot Hologram
hologram base
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Milara Smart Prealigner 3" to 12"
MILARA SMART PREALIGNER 3" - 12"
Category:
Prealigners
Atmosphere CE Certificate S2 Certificate S28 Certificate
  • ▶  Industry leading alignment precision
  • ▶  Self-calibration and self-diagnostic
  • ▶  RGB and IR light sources for faster edge detection
  • ▶  Moving lighthouse
    • H5 Vacuum Wafer Handling Robot
    H5 VACUUM WAFER HANDLING ROBOT
    Category:
    Robots > Diamond series
    Vacuum Single Arm TUV Certificate S2 Certificate
  • ▶  Modular and highly customizable design
  • ▶  Harmonic Drive® gears
  • ▶  Optional teach pendant terminal
  • ▶  Powerful wafer handling firmware
    • H4 wafer handling robot
    H4 WAFER HANDLING ROBOT
    Category:
    Robots > Diamond series
    Atmosphere Dual Arm Hot Wafers CE Certificate
  • ▶  Modular and highly customizable design
  • ▶  Powerful wafer handling firmware
  • ▶  Seamless integration with prealigner, linear track and other peripheral components.
  • ▶  Class 1 clean-room environment compatibility.
    • H3 Milara Wafer Handling Robot
    H3 WAFER HANDLING ROBOT
    Category:
    Robots > Diamond series
    Atmosphere Hot Wafers CE Certificate S2 Certificate
  • ▶  Arm length from 10.50” up to 24.00”
  • ▶  High response brushless motors and precise zero-backlash
  • ▶  Modular and highly customizable design
  • ▶  Powerful wafer handling firmware
    • Milara H1 Wafer Handling Robot
    H1 WAFER HANDLING ROBOT
    Category:
    Robots > Diamond series
    Atmosphere Hot Wafers CE Certificate S2 Certificate
  • ▶  Modular and highly customizable design
  • ▶  Handling radial and in-line equipment placement
  • ▶  Arm length from 10.50” and 14.40”
  • ▶  Powerful wafer handling firmware
    • Wafer Handling Robot with Track
    H4 PLUS WAFER HANDLING ROBOT
    Category:
    Robots > Diamond series
    Atmosphere Dual Arm CE Certificate S2 Certificate
  • ▶  Excellent structural rigidity
  • ▶  Modular and highly customizable design
  • ▶  Variety of End Effector options
    • Equipe Single Arm Robot
    EQUIPE SINGLE ARM WAFER HANDLING ROBOT
    Category:
    Robots > Equipe series
    Atmosphere CE Certificate S2 Certificate S28 Certificate
  • ▶  High ESD tolerance
  • ▶  Compact footprint
  • ▶  Highly repeatable positioning
    • Equipe Wafer Handling Robot
    EQUIPE DUAL ARM WAFER HANDLING ROBOT
    Category:
    Robots > Equipe series
    Atmosphere Dual Arm CE Certificate S2 Certificate
  • ▶  Optimized for fast wafer swaps
  • ▶  Standard Integral horseshoe end effectors
  • ▶  Full 360° theta rotation eliminates dead zone
    • Milara Reticle Robot
    RETICLE ROBOT
    Category:
    Robots > Diamond series
    Atmosphere CE Certificate S2 Certificate S28 Certificate
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    • Milara Wafer Handler
    SMALL WAFER SYSTEMS
    Category:
    Small wafer system
  • ▶  Highly customizable design for meeting all your production needs
  • ▶  Small form factor to minimize the footprint
  • ▶  Fully compliant with SEMI standards
  • ▶  Class 1 Clean room compatible
    • Milara Wafer Sorter
    WAFER SORTERS
    Category:
    Sorters
  • ▶  Unparalleled throughput of up to 720 wafers per hour
  • ▶  Processing of up to 24 carriers simultaneously
  • ▶  Modular design ensuring independency from any type of wafer processing
    • Milara EFEM
    EFEM MODULES
    Category:
    EFEM
  • ▶  One to four 300mm Load Port configuration and/or up to 24 open cassettes for 50mm-200mm wafers
  • ▶  EFEM can be configured as a "bridge tool" for FOUPs and open cassettes of various sizes.
  • ▶  Modular design with vibration isolation, ensuring independency from any type of wafer processing, inspection and measurment.
    • Custom wafer handler
    CUSTOM WAFER HANDLING SYSTEMS
    Category:
    Custom wafer handlers
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    Wafer handling components

    Semiconductor EFEM

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