Products - Feature Dual Arm

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H4 wafer handling robot
H4 WAFER HANDLING ROBOT
Category:
Robots > Diamond series
Atmosphere Dual Arm Hot Wafers CE Certificate
  • ▶  Modular and highly customizable design
  • ▶  Powerful wafer handling firmware
  • ▶  Seamless integration with prealigner, linear track and other peripheral components.
  • ▶  Class 1 clean-room environment compatibility.
    • Wafer Handling Robot with Track
    H4 PLUS WAFER HANDLING ROBOT
    Category:
    Robots > Diamond series
    Atmosphere Dual Arm CE Certificate S2 Certificate
  • ▶  Excellent structural rigidity
  • ▶  Modular and highly customizable design
  • ▶  Variety of End Effector options
    • Equipe Wafer Handling Robot
    EQUIPE DUAL ARM WAFER HANDLING ROBOT
    Category:
    Robots > Equipe series
    Atmosphere Dual Arm CE Certificate S2 Certificate
  • ▶  Optimized for fast wafer swaps
  • ▶  Standard Integral horseshoe end effectors
  • ▶  Full 360° theta rotation eliminates dead zone

    • Products

    Wafer handling components

    Semiconductor EFEM

    Engineering design services

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