Products - Feature S2 Certificate

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MILARA SMART PREALIGNER 3" - 12"
Category:
Atmosphere CE Certificate S2 Certificate S28 Certificate
  • ▶  Industry leading alignment precision
  • ▶  Self-calibration and self-diagnostic
  • ▶  RGB and IR light sources for faster edge detection
  • ▶  Moving lighthouse
  • H5 Vacuum Wafer Handling Robot
    H5 VACUUM WAFER HANDLING ROBOT
    Vacuum Single Arm TUV Certificate S2 Certificate
  • ▶  Modular and highly customizable design
  • ▶  Harmonic Drive® gears
  • ▶  Optional teach pendant terminal
  • ▶  Powerful wafer handling firmware
  • H4 WAFER HANDLING ROBOT
    Atmosphere Dual Arm Hot Wafers CE Certificate
  • ▶  Modular and highly customizable design
  • ▶  Powerful wafer handling firmware
  • ▶  Seamless integration with prealigner, linear track and other peripheral components.
  • ▶  Class 1 clean-room environment compatibility.
  • H3 Milara Wafer Handling Robot
    H3 WAFER HANDLING ROBOT
    Atmosphere Hot Wafers CE Certificate S2 Certificate
  • ▶  Arm length from 10.50” up to 24.00”
  • ▶  High response brushless motors and precise zero-backlash
  • ▶  Modular and highly customizable design
  • ▶  Powerful wafer handling firmware
  • Milara H1 Wafer Handling Robot
    H1 WAFER HANDLING ROBOT
    Atmosphere Hot Wafers CE Certificate S2 Certificate
  • ▶  Modular and highly customizable design
  • ▶  Handling radial and in-line equipment placement
  • ▶  Arm length from 10.50” and 14.40”
  • ▶  Powerful wafer handling firmware
  • Wafer Handling Robot with Track
    H4 PLUS WAFER HANDLING ROBOT
    Atmosphere Dual Arm CE Certificate S2 Certificate
  • ▶  Excellent structural rigidity
  • ▶  Modular and highly customizable design
  • ▶  Variety of End Effector options
  • Equipe Single Arm Robot
    EQUIPE SINGLE ARM WAFER HANDLING ROBOT
    Atmosphere CE Certificate S2 Certificate S28 Certificate
  • ▶  High ESD tolerance
  • ▶  Compact footprint
  • ▶  Highly repeatable positioning
  • Equipe Wafer Handling Robot
    EQUIPE DUAL ARM WAFER HANDLING ROBOT
    Atmosphere Dual Arm CE Certificate S2 Certificate
  • ▶  Optimized for fast wafer swaps
  • ▶  Standard Integral horseshoe end effectors
  • ▶  Full 360° theta rotation eliminates dead zone
  • Milara Reticle Robot
    RETICLE ROBOT
    Atmosphere CE Certificate S2 Certificate S28 Certificate
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