Products - Feature Vertical Travel 21"

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H3 Milara Wafer Handling Robot
H3 WAFER HANDLING ROBOT
Atmosphere Hot Wafers CE Certificate S2 Certificate
  • ▶  Arm length from 10.50” up to 24.00”
  • ▶  High response brushless motors and precise zero-backlash
  • ▶  Modular and highly customizable design
  • ▶  Powerful wafer handling firmware