CUSTOM WAFER HANDLING SYSTEMS

Elevate your semiconductor manufacturing process with our Custom Wafer Handling Systems, meticulously designed to meet your unique operational requirements. Our tailor-made solutions ensure precise, efficient, and reliable wafer handling, addressing every customer’s specific needs and exceeding industry standards.

  • ▶  Custom Design and Engineering
  • ▶  Advanced Automation
  • ▶  Reliable and field-proven components

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    Additional Information

    Elevate your semiconductor manufacturing process with our Custom Wafer Handling Systems, meticulously designed to meet your unique operational requirements. Our tailor-made solutions ensure precise, efficient, and reliable wafer handling, addressing every customer’s specific needs and exceeding industry standards.

    Whether you need a complete turnkey system or modifications to your existing equipment, our expert team collaborates with you to deliver the perfect solution. From design to implementation, we prioritize precision, flexibility, and efficiency to optimize your workflow and achieve unmatched performance.

    • Highly customizable design for meeting all your production needs.
    • High-throughput and reliable Milara single or dual arm robot for fast wafer swapping.
    • OCR integrated within the prealigner module reliably track IDs on both sides of the substrate.
    • Option to integrate digital scale, measurement, or inspection equipment within the handler frame.
    • Variety of end effector options including vacuum gripping and edge gripping. End Effectors include integrated through-beam sensor for quick and reliable wafer mapping and reporting for: occupied slots, empty slots, and cross-slotted substrates.
    • Full line of autonomous Wafer Prealigners centering from 50mm to 300mm wafers with 20 microns accuracy or better.
    • Optional Fan Filter Unit providing mini-environment laminar flow for maximum cleanliness.
    • Optional SECS/GEM interface.
    • ISO 3 (ISO14644) / Class 1 (FED STD 209E) Clean room compliant.
    • Compliant with SEMI standards.
    • Reliability – MTBF > 60,000 hours, (MCBF > 10,000,000 cycles).
    • Monitor and Keyboard.
    • Powder coat or stainless-steel finish.