WAFER SORTERS
The latest generation high-throughput wafer sorting platform from Milara Inc. It brings to market innovative and fully automated cassette stations, which provide a complete system from the loading of new substrates through the unloading of processed substrates without interrupting the robot cycle.
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The latest generation high-throughput wafer sorting platform from Milara Inc. It brings to market innovative and fully automated cassette stations, which provide a complete system from the loading of new substrates through the unloading of processed substrates without interrupting the robot cycle. This enables unparalleled processing throughput of more than 220 wafers per hour. A modular design allows for the processing of up to 20 carriers simultaneously and central to the system is Milara’s Diamond H4 dual-arm robot for rapid wafer swapping. End effectors on the robot include integrated through-beam sensors for quick and reliable wafer mapping, reporting occupied or empty slots, and identifying cross-slotted substrates. Fully integrated precision wafer handling components include an autonomous pre-aligner to center wafers with 25 micron accuracy, an optical character reader to reliably track ID’s on both sides of the substrate, and high-precision digital scales capable of measuring a wafer in one half of a second with 1 milligram resolution. All components of the system are Class 1 compatible and a quiet fan filter built into the mini-environment provides laminar flow for maximum cleanliness.
- Innovative fully automated cassette load ports allow loading of new substrates and unloading of processed substrates without interrupting the robot cycle, providing unparalleled throughput of up to 720 wafers per hour.
- Modular design with vibration isolation, ensuring independency from any type of wafer processing, inspection and measurment.
- Highly customizable design for meeting all your production needs.
- Industry-standard BOLTS interface allows for mounting of loadports, process modules, measurement and other equipment.
- Loadport configurations allow processing of up to 24 carriers simultaneously to meet production demands.
- Fully compliant with SEMI standards.
- Industry 4.0 ready.
- Optional SECS/GEM interface.
- All materials and components are Class 1 Clean room compatible. Milara’s EFEM can include a Fan Filter Unit providing minienvironment laminar flow for maximum cleanliness.
- High-throughput and reliable Milara single or dual arm robot for fast wafer swapping.
- OCR integrated within the prealigner module reliably track IDs on both sides of the substrate.
- Option to integrate digital scale, measurement, or inspection equipment within the sorter frame.
- Variety of end effector options including vacuum gripping and edge gripping. End Effectors include integrated through-beam sensor for quick and reliable wafer mapping and reporting for: occupied slots, empty slots, and cross-slotted substrates.
- Full line of autonomous Wafer Prealigners centering from 50mm to 300mm wafers with 20 microns accuracy or better.
- Clean Linear track with linear motors.
- Reliability – MTBF > 60,000 hours, (MCBF > 10,000,000 cycles).
- Monitor and Keyboard.