SMALL WAFER SYSTEMS (WAFER HANDLERS)
Small Wafer Handler system for semiconductor industry. The system is a digital controlled handling system with high accuracy and flexibility for quick operation processes for today’s fast paced manufacturing.
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Small Wafer Handler system for semiconductor industry. The system is a digital controlled handling system with high accuracy and flexibility for quick operation processes for today’s fast paced manufacturing.
Milara continuously provides customers with custom wafer handler solutions for 200/300mm wafer platform. Our leading-edge technologies and our highly reliable and unique products offer the best solutions for the requirements of your semiconductor equipment.
The Small Wafer Handler is designed for fast wafer processing in the semiconductor industry. It delivers an optimized handling of wafers with a standard and non-standard sizes. The unique design of the system enables a very short cycle time as well as low power consumption. It allows applications such as rapid thermal processing (RTP), tempering and bonding, taking full advantage of the high flexibility of our systems
The Small Wafer System (SWS) offers small footprint and improved throughput. The integration of the tool with a broad range of process tools allows for quick introduction into existing production lines.
- Milara Small Wafer Stations (SWS) have highly customizable design for meeting all your production needs
- Low cost of ownership with high ROI
- Small form factor to minimize the footprint.
- Modular design with vibration isolation, ensuring independency from any type of wafer processing, inspection and measurement
- One or two open cassettes for 100mm-200mm wafers. Can be configured as a “bridge tool” for FOUPs and open cassettes of various sizes
- Full line of autonomous Wafer Prealigners centering from 50mm to 300mm wafers with 20 microns accuracy or better
- High-throughput and reliable Milara single or dual arm robot for fast wafer swapping
- Variety of end effector options including vacuum gripping and edge gripping. End Effectors include integrated through-beam sensor for quick and reliable wafer mapping as well as reporting for: occupied slots, empty slots, and cross-slotted substrates.
- OCR integrated within the prealigner module reliably track IDs on both sides of the substrate.
- Option to integrate digital scale, measurement, or inspection equipment within the frame.
- Milara Wafer Handlers can include a Fan Filter Unit providing minienvironment laminar flow for maximum cleanliness.
- Optional SECS/GEM interface
- Optional Fan Filter Unit can provide mini-environment laminar flow for maximum cleanliness.
- Monitor and Keyboard
- Reliability – MTBF > 60,000 hours
- ISO 3 (ISO 14644) / Class 1 (FED STD 209E) Clean room compliant.
- Wafer Flipping (optional)
- Powder coat or stainless-steel finish