Products - Category Modules and systems

Showing 1 - 4 of 4
Milara Wafer Handler
SMALL WAFER SYSTEMS
  • ▶  Highly customizable design for meeting all your production needs
  • ▶  Small form factor to minimize the footprint
  • ▶  Fully compliant with SEMI standards
  • ▶  Class 1 Clean room compatible
  • Milara Wafer Sorter
    WAFER SORTERS
    Category:
  • ▶  Unparalleled throughput of up to 720 wafers per hour
  • ▶  Processing of up to 24 carriers simultaneously
  • ▶  Modular design ensuring independency from any type of wafer processing
  • Milara EFEM
    EFEM MODULES
    Category:
  • ▶  One to four 300mm Load Port configuration and/or up to 24 open cassettes for 50mm-200mm wafers
  • ▶  EFEM can be configured as a "bridge tool" for FOUPs and open cassettes of various sizes.
  • ▶  Modular design with vibration isolation, ensuring independency from any type of wafer processing, inspection and measurment.
  • CUSTOM WAFER HANDLING SYSTEMS
  • ▶  Feature 1
  • ▶  Feature 2
  • ▶  Feature 3