Products - Category Modules and systems

Showing 1 - 4 of 4
Milara Wafer Handler
SMALL WAFER SYSTEMS
  • ▶  Highly customizable design for meeting all your production needs
  • ▶  Small form factor to minimize the footprint
  • ▶  Low cost of ownership with high ROI
  • ▶  Integrated design for easy setup and installation
  • Milara Wafer Sorter
    WAFER SORTERS
    Category:
  • ▶  Unparalleled throughput of up to 720 wafers per hour
  • ▶  Processing of up to 24 carriers simultaneously
  • ▶  Modular design ensuring independence from any type of wafer processing
  • Milara EFEM
    EFEM MODULES FOR SEMICONDUCTOR MANUFACTURING
    Category:
  • ▶  One to five 300mm Load Port configuration and/or up to 24 open cassettes for 50mm-200mm wafers
  • ▶  EFEM can be configured as a "bridge tool" for FOUPs and open cassettes of various sizes.
  • ▶  Modular design with vibration isolation, ensuring independency from any type of wafer processing, inspection and measurment.
  • CUSTOM WAFER HANDLING SYSTEMS
  • ▶  Custom Design and Engineering
  • ▶  Advanced Automation
  • ▶  Reliable and field-proven components