Products - Category Modules and systems Filter Filter Showing 1 - 4 of 4 Sort by: RecommendedNewest First Oldest First Title Title (desc) SearchSearch Product FilterProduct Category Machine (4) Wafer Handling Component (0) Any Machine type EFEM 1 Sorter 1 Handler 2 Component Type Single Arm Robot Dual Arm Robot Prealigner Elevator Controller Apply Filters SMALL WAFER SYSTEMS (WAFER HANDLERS) Category:Small wafer system ▶Â Highly customizable design for meeting all your production needs ▶Â Small form factor to minimize the footprint ▶Â Low cost of ownership with high ROI ▶Â Integrated design for easy setup and installation View DetailsGet a quote WAFER SORTERS Category:Sorters ▶Â Unparalleled throughput of up to 720 wafers per hour ▶Â Processing of up to 24 carriers simultaneously ▶Â Modular design ensuring independence from any type of wafer processing View DetailsGet a quote EFEM MODULES FOR SEMICONDUCTOR MANUFACTURING Category:EFEM ▶Â One to five 300mm Load Port configuration and/or up to 24 open cassettes for 50mm-200mm wafers ▶Â EFEM can be configured as a "bridge tool" for FOUPs and open cassettes of various sizes. ▶Â Modular design with vibration isolation, ensuring independency from any type of wafer processing, inspection and measurment. View DetailsGet a quote CUSTOM WAFER HANDLING SYSTEMS Category:Custom wafer handlers ▶Â Custom Design and Engineering ▶Â Advanced Automation ▶Â Reliable and field-proven components View DetailsGet a quote