EFEM MODULES
The EFEM (Equipment Front End Module) is a class 1 mini-environment system designed to maximize productivity of semiconductor processing equipment tools that require the highest level of automation.
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Additional Information
The EFEM (Equipment Front End Module) is a class 1 mini-environment system designed to maximize productivity of semiconductor processing equipment tools that require the highest level of automation. The Load Port is modular and can seamlessly integrate to the OEM process tools. Milara EFEMs can be customized to meet the automation requirements of any semiconductor manufacturing facility, adding stations such as pre-aligners and OCR. Capable of handling various wafer sizes with 1-4 load ports or custom cassette holders. Milara’s Process and EFEM modules are built to customer specification to meet specific system and layout requirements.
- Highly customizable design for meeting all your production needs.
- Modular design with vibration isolation, ensuring independency from any type of wafer processing, inspection and measurment.
- One to four 300mm Load Port configuration and/or up to 24 open cassettes for 50mm-200mm wafers. EFEM can be configured as a “bridge tool” for FOUPs and open cassettes of various sizes.
- Industry-standard SEMI BOLTS interface allows for mounting of load ports, process modules, measurement and other equipment.
- All materials and components are Class 1 Clean room compatible. Milara’s EFEM can include a Fan Filter Unit providing minienvironment laminar flow for maximum cleanliness.
- Full line of autonomus Wafer Prealigners centering from 50mm to 300mm wafers with 20 microns accuracy or better
- Fully compliant with SEMI standards.
- Through the wall or Ball Room mounting.
- Optional SECS/GEM interface.
- Industry 4.0 ready
- High-throughput and reliable Milara single or dual arm robot for fast wafer swapping.
- OCR integrated within the prealigner module reliably track IDs on both sides of the substrate.
- Option to integrate digital scale, measurement, or inspection equipment within the EFEM frame.
- Variety of end effector options including vacuum gripping and edge gripping. End Effectors include integrated through-beam sensor for quick and reliable wafer mapping as well as reporting for: occupied slots, empty slots, and cross-slotted substrates.
- Clean Linear track with linear motors
- Monitor and Keyboard
- Reliability – MTBF > 60,000 hours, (MCBF > 10,000,000 cycles)
- PTFE ULPA 99.99995% @ 0.1 micro meters efficiency
- Wafer Flipping (optional)
- Powder coat or stainless-steel finish