Products - Category EFEM Filter Filter Showing 1 - 1 of 1 Sort by: RecommendedNewest First Oldest First Title Title (desc) SearchSearch Product FilterProduct Category Machine (1) Wafer Handling Component (0) Any Machine type EFEM 1 Sorter 0 Handler 0 Component Type Single Arm Robot Dual Arm Robot Prealigner Elevator Controller Apply Filters EFEM MODULES FOR SEMICONDUCTOR MANUFACTURING Category:EFEM ▶Â One to five 300mm Load Port configuration and/or up to 24 open cassettes for 50mm-200mm wafers ▶Â EFEM can be configured as a "bridge tool" for FOUPs and open cassettes of various sizes. ▶Â Modular design with vibration isolation, ensuring independency from any type of wafer processing, inspection and measurment. View DetailsGet a quote
