Products - Category EFEM

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Milara EFEM
  • ▶  One to four 300mm Load Port configuration and/or up to 24 open cassettes for 50mm-200mm wafers
  • ▶  EFEM can be configured as a "bridge tool" for FOUPs and open cassettes of various sizes.
  • ▶  Modular design with vibration isolation, ensuring independency from any type of wafer processing, inspection and measurment.