MILARA SMART PREALIGNER 3″ – 12″
Milara Smart Prealigner offers industry leading alignment precision using a high-resolution encoder.
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Designed and Manufactured by Milara in EU.
Additional Information
Milara Smart Prealigner offers industry leading alignment precision using a high-resolution encoder. The aligner unit features RGB and IR light sources allowing easier and faster edge detection for semi-transparent and glass carriers. The moving lighthouse allows alignment of square and round substrates with non-standard sizes. Milara Smart Prealigner is equipped with with self-calibration and self-diagnostic capabilities. A web interface with M2M communication capability for smart manufacturing and automation is at your disposal. Wide variety of Chuck and Pin materials are available – Peek, Tekapeek ELS nano, Semitron ESD420, Viton, Kalrez, Ceramic, etc.
| Wafer Diameter | From 3” to 12” | |
| Non-standard size wafers
(e.g. 108mm, 208mm etc.) |
Yes | |
| Square Substrates | Yes | |
| Flat and Notch Compatibility | Yes | |
| Wafer Opacity | Transparent, Semi-Transparent, Opaque | |
| Angular Accuracy | 0.015° | |
| Centering Accuracy | 20 um / 0.0007” | |
| Initial Offset Limit | 10 mm / 0.39” | |
| Chuck and pins materials | Peek, Tekapeek ELS nano, Semitron ESD420, Viton, Kalrez, Ceramic, etc. | |
| Alignment time | <4 sec | |
| Body Dimensions | Width | 173mm / 6,811” |
| Length | 317mm / 12,480” | |
| Height | 188.50mm / 7,421” | |
| Weight (kg) | 5.00 | |
| Servo Axes | Four | |
| Handling | Vacuum | |
| Facilities Required | 100-240 VAC, 50-60 Hz or 24 VDC/3A
Minimum vacuum: 70 kPa Minimum airflow: 100 cc/sec. (at 70 kPa) |
|
| Host Communication | RS232 or Ethernet | |
| Light Source | Adaptive | |
| Cleanliness | ISO 3 (ISO 14644) / Class 1 (FED STD 209E) Clean room compliant | |
| Nitrogen purge | Optional | |
| MTBF | >60 000hours / >10 000 000 cycles | |
| Certification | TUV (IEC/UL61010-1) | |
| Compliance | SEMI S2, S8 and CE / UKCA compliant | |
