MILARA SMART PREALIGNER 3″ – 12″

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Milara Smart Prealigner offers industry leading alignment precision using a high-resolution encoder.

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  • ▶  Industry leading alignment precision
  • ▶  Self-calibration and self-diagnostic
  • ▶  RGB and IR light sources for faster edge detection
  • ▶  Moving lighthouse

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    Designed and Manufactured by Milara in EU.

    Additional Information

    Milara Smart Prealigner offers industry leading alignment precision using a high-resolution encoder. The aligner unit features RGB and IR light sources allowing easier and faster edge detection for semi-transparent and glass carriers. The moving lighthouse allows alignment of square and round substrates with non-standard sizes. Milara Smart Prealigner is Industry 4.0 ready with self-calibration and self-diagnostic capabilities. A web interface with M2M communication capability for smart manufacturing and automation is at your disposal. Wide variety of Chuck and Pin materials are available – Peek, Tekapeek ELS nano, Semitron ESD420, Viton, Kalrez, Ceramic, etc.

    Wafer Diameter From 3” to 12”
    Non-standard size wafers

    (e.g. 108mm, 208mm etc.)

    Yes
    Square Substrates Yes
    Flat and Notch Compatibility Yes
    Wafer Opacity Transparent, Semi-Transparent, Opaque
    Angular Accuracy 0.015°
    Centering Accuracy 20 um / 0.0007”
    Initial Offset Limit 10 mm / 0.39”
    Chuck and pins materials Peek, Tekapeek ELS nano, Semitron ESD420, Viton, Kalrez, Ceramic, etc.
    Alignment time <4 sec
    Body Dimensions Width 173mm / 6,811”
    Length 317mm / 12,480”
    Height 188.50mm / 7,421”
    Weight (kg) 5.00
    Servo Axes Four
    Handling Vacuum
    Facilities Required 100-240 VAC, 50-60 Hz or 24 VDC/3A

    Minimum vacuum: 70 kPa

    Minimum airflow: 100 cc/sec. (at 70 kPa)

    Host Communication RS232 or Ethernet
    Light Source Adaptive
    Cleanliness Class 1
    Nitrogen purge Optional
    MTBF >60 000hours / >10 000 000 cycles
    Certification TUV-SUD, SEMI S2 and CE