E5 VACUUM ELEVATOR
The Diamond E5 series vacuum elevator represent a signifcant engineering advancement in the design and reliability of wafer handling equipment.
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Manufactured by Milara Inc. USA and designed by Logosol Inc. USA
Additional Information
The Diamond E5 series vacuum elevator represent a significant engineering advancement in the design and reliability of wafer handling equipment.
Benefiting from technologically superior components, the elevator utilize ultra low inertia, high-response brushless servomotors coupled with zero-backlash Harmonic Drive® gears to achieve greatly enhanced dexterity and precision.
The innovative, all-in-one design incorporates the motion controller, servo amplifiers, and power supply within the robot’s industry standard footprint.
High-strength structural members enable mounting on either top or bottom surface of flange without compromising system rigidity.
Networkable RS-485 and Ethernet interfaces complement the standard RS-232 and teach pendant connections.
Powerful native wafer handling and scripting languages facilitate rapid software development for embedding the robots into an OEM application environment.
Comprehensive emulation of legacy robot “macro” commands offers a drop-in compatibility with a wide variety of existing semiconductor tools.
- Excellent structural rigidity
- Modular and highly customizable design
- Vertical travel up to 14.48”
- Fully integrated motion controller, servo amplifiers and power supply
- Standard RS-232 interface and Ethernet (Telnet) interfaces to the host computer
- Seamless integration with H5 vacuum robot
- Comprehensive software tools and utilities
- Powerful wafer handling firmware
- Software emulation for legacy robot macro commands
- Optional teach pendant terminal
- General purpose digital inputs and outputs for custom use
- Reliability – MTBF > 60,000 hours (MCBF >10,000,000 cycles)