Products - Category Robots

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H5 Vacuum Wafer Handling Robot
H5 VACUUM WAFER HANDLING ROBOT
Category:
Robots > Diamond series
S2 Compliance KCs Certificate S8 Compliance S22 Compliance
  • ▶  Modular and highly customizable design
  • ▶  Arm length from 16” up to 20”
  • ▶  Optional teach pendant terminal
  • ▶  Powerful wafer handling firmware
    • E5 vacuum elevator
    E5 VACUUM ELEVATOR
    Category:
    Robots > Diamond series
    CE Certificate S2 Compliance UKCA Cetificate S8 Compliance
  • ▶  Excellent structural rigidity
  • ▶  Seamless integration with H5 vacuum robot
  • ▶  Vertical travel up to 14.48”
  • ▶  Powerful wafer handling firmware
    • H4 wafer handling robot
    H4 WAFER HANDLING ROBOT
    Category:
    Robots > Diamond series
    Atmosphere Dual Arm CE Certificate KCs Certificate
  • ▶  Modular and highly customizable design
  • ▶  Arm length from 10.50” up to 20”
  • ▶  Seamless integration with prealigner, linear track and other peripheral components.
  • ▶  Fully integrated motion controller, servo amplifiers and power supply.
    • H3 Milara Wafer Handling Robot
    H3 WAFER HANDLING ROBOT
    Category:
    Robots > Diamond series
    Atmosphere CE Certificate S2 Compliance KCs Certificate
  • ▶  Arm length from 10.50” up to 23.62”
  • ▶  High response brushless motors and precise zero-backlash
  • ▶  Modular and highly customizable design
  • ▶  Powerful wafer handling firmware
    • Milara H1 Wafer Handling Robot
    H1 WAFER HANDLING ROBOT
    Category:
    Robots > Diamond series
    Atmosphere CE Certificate S2 Compliance KCs Certificate
  • ▶  Modular and highly customizable design
  • ▶  Handling radial and in-line equipment placement
  • ▶  Arm length from 10.50” and 14.40”
  • ▶  Powerful wafer handling firmware
    • Equipe GEN2 ESC 200 Controller
    EQUIPE GEN2 CONTROLLER ESC 200 SERIES
    Category:
    Robots > Equipe series
    CE Certificate S2 Compliance S8 Compliance S22 Compliance
  • ▶  Optimized for fast wafer swaps.
  • ▶  Minimizes host system interaction to speed throughput.
  • ▶  “S-Curve” motion profiles provide smooth, fast wafer transfers and increased robot life.
    • Wafer Handling Robot with Track
    H4 PLUS WAFER HANDLING ROBOT
    Category:
    Robots > Diamond series
    Atmosphere Dual Arm
  • ▶  Excellent structural rigidity
  • ▶  Modular and highly customizable design
  • ▶  Variety of End Effector options
    • Equipe ATM 100 Single Arm Wafer Handling Robot
    EQUIPE GEN2 SINGLE ARM WAFER HANDLING ROBOT
    Category:
    Robots > Equipe series
    Atmosphere CE Certificate S2 Compliance S22 Compliance
  • ▶  Designed for handling wafers and reticles up to 300mm
  • ▶  Rrapid motion with no sensitivity loss
  • ▶  Free of backlash, providing highly repeatable positioning
    • Equipe Wafer Handling Robot
    EQUIPE DUAL ARM WAFER HANDLING ROBOT
    Category:
    Robots > Equipe series
    Atmosphere Dual Arm CE Certificate S2 Compliance
  • ▶  Optimized for fast wafer swaps
  • ▶  Standard Integral horseshoe end effectors
  • ▶  Full 360° theta rotation eliminates dead zone
    • Milara Reticle Robot
    RETICLE ROBOT
    Category:
    Robots > Diamond series
    Atmosphere Single Arm

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