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        H4 wafer handling robot
        Dual Arm Robots
        H3 Milara Wafer Handling Robot
        Single Arm Robots
        Milara Smart Prealigner 3" to 12"
        Prealigners
        H4 wafer handling robot
        Dual Arm Robots
        H3 Milara Wafer Handling Robot
        Single Arm Robots
        Milara Smart Prealigner 3" to 12"
        Prealigners
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Products - Category Robots

Showing 1 - 10 of 10
H5 Vacuum Wafer Handling Robot
H5 VACUUM WAFER HANDLING ROBOT
Category:
Diamond series > Robots
KCs Certificate S2 Compliance S22 Compliance S8 Compliance
  • ▶  Modular and highly customizable design
  • ▶  Arm length from 16” up to 20”
  • ▶  Optional teach pendant terminal
  • ▶  Powerful wafer handling firmware
    • E5 vacuum elevator
    E5 VACUUM ELEVATOR
    Category:
    Diamond series > Robots
    CE Certificate S2 Compliance S8 Compliance UKCA Cetificate
  • ▶  Excellent structural rigidity
  • ▶  Seamless integration with H5 vacuum robot
  • ▶  Vertical travel up to 14.48”
  • ▶  Powerful wafer handling firmware
    • H4 wafer handling robot
    H4 WAFER HANDLING ROBOT
    Category:
    Diamond series > Robots
    Atmosphere CE Certificate Dual Arm KCs Certificate
  • ▶  Modular and highly customizable design
  • ▶  Arm length from 10.50” up to 20”
  • ▶  Seamless integration with prealigner, linear track and other peripheral components.
  • ▶  Fully integrated motion controller, servo amplifiers and power supply.
    • H3 Milara Wafer Handling Robot
    H3 WAFER HANDLING ROBOT
    Category:
    Diamond series > Robots
    Atmosphere CE Certificate KCs Certificate S2 Compliance
  • ▶  Arm length from 10.50” up to 23.62”
  • ▶  High response brushless motors and precise zero-backlash
  • ▶  Modular and highly customizable design
  • ▶  Powerful wafer handling firmware
    • Milara H1 Wafer Handling Robot
    H1 WAFER HANDLING ROBOT
    Category:
    Diamond series > Robots
    Atmosphere CE Certificate KCs Certificate S2 Compliance
  • ▶  Modular and highly customizable design
  • ▶  Handling radial and in-line equipment placement
  • ▶  Arm length from 10.50” and 14.40”
  • ▶  Powerful wafer handling firmware
    • Equipe GEN2 ESC 200 Controller
    EQUIPE GEN2 CONTROLLER ESC 200 SERIES
    Category:
    Equipe series > Robots
    CE Certificate S2 Compliance S22 Compliance S8 Compliance
  • ▶  Optimized for fast wafer swaps.
  • ▶  Minimizes host system interaction to speed throughput.
  • ▶  “S-Curve” motion profiles provide smooth, fast wafer transfers and increased robot life.
    • Wafer Handling Robot with Track
    H4 PLUS WAFER HANDLING ROBOT
    Category:
    Diamond series > Robots
    Atmosphere Dual Arm
  • ▶  Excellent structural rigidity
  • ▶  Modular and highly customizable design
  • ▶  Variety of End Effector options
    • Equipe ATM 100 Single Arm Wafer Handling Robot
    EQUIPE GEN2 SINGLE ARM WAFER HANDLING ROBOT
    Category:
    Equipe series > Robots
    Atmosphere CE Certificate S2 Compliance S22 Compliance
  • ▶  Designed for handling wafers and reticles up to 300mm
  • ▶  Rrapid motion with no sensitivity loss
  • ▶  Free of backlash, providing highly repeatable positioning
    • Equipe Wafer Handling Robot
    EQUIPE DUAL ARM WAFER HANDLING ROBOT
    Category:
    Equipe series > Robots
    Atmosphere CE Certificate Dual Arm S2 Compliance
  • ▶  Optimized for fast wafer swaps
  • ▶  Standard Integral horseshoe end effectors
  • ▶  Full 360° theta rotation eliminates dead zone
    • Milara Reticle Robot
    RETICLE ROBOT
    Category:
    Diamond series > Robots
    Atmosphere Single Arm