Products - Category Equipe series

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Equipe GEN2 ESC 200 Controller
EQUIPE GEN2 CONTROLLER ESC 200 SERIES
Category:
Robots > Equipe series
CE Certificate S2 Compliance S8 Compliance S22 Compliance
  • ▶  Optimized for fast wafer swaps.
  • ▶  Minimizes host system interaction to speed throughput.
  • ▶  “S-Curve” motion profiles provide smooth, fast wafer transfers and increased robot life.
    • Equipe ATM 100 Single Arm Wafer Handling Robot
    EQUIPE GEN2 SINGLE ARM WAFER HANDLING ROBOT
    Category:
    Robots > Equipe series
    Atmosphere CE Certificate S2 Compliance S22 Compliance
  • ▶  Designed for handling wafers and reticles up to 300mm
  • ▶  Rrapid motion with no sensitivity loss
  • ▶  Free of backlash, providing highly repeatable positioning
    • Equipe Wafer Handling Robot
    EQUIPE DUAL ARM WAFER HANDLING ROBOT
    Category:
    Robots > Equipe series
    Atmosphere Dual Arm CE Certificate S2 Compliance
  • ▶  Optimized for fast wafer swaps
  • ▶  Standard Integral horseshoe end effectors
  • ▶  Full 360° theta rotation eliminates dead zone

    • Products

    Wafer handling components

    Semiconductor EFEM

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