EQUIPE SINGLE ARM WAFER HANDLING ROBOT

General Specifications:

• Payload: 1 lb.
• Substrate Sensors: Vacuum, Laser Cassette Mapping Optional.
• Cleanliness: Class 1 (with fan Option).
• Weight: ATM 100, 28 lbs.
• Utilities Required: Vacuum 18-24 inches Hg, Power 100 – 240 VAC, 50/60 Hz.
• Throughput: < 4 seconds / wafer / pick and place (transfer).
• MTBF: 75,000 Hrs.

Mounting Specifications:

• Robot Hole Diameter: 8.500″
• Robot Bolt Pattern: 3×1/4-20 on dia. 9.000″
• End Effector: 4×4-40 on dia. 1.390″
• Dead Zone: 25° Dead Zone
• Canister: Minimum space required: 16.500″ Canister diameter: 8.000″