Equipe Single Arm Robot
Equipe Single Arm Robot
Equipe Single Arm Wafer Handling Robot

EQUIPE SINGLE ARM WAFER HANDLING ROBOT

Category:
Atmosphere Single Arm Vertical Travel 13" CE Certificate TUV Certificate S2 Certificate S28 Certificate
  • ▶  High ESD tolerance
  • ▶  Compact footprint
  • ▶  Highly repeatable positioning

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    Additional Information

    General Specifications:

    • Payload: 1 lb.
    • Substrate Sensors: Vacuum, Laser Cassette Mapping Optional.
    • Cleanliness: Class 1 (with fan Option).
    • Weight: ATM 100, 28 lbs.
    • Utilities Required: Vacuum 18-24 inches Hg, Power 100 – 240 VAC, 50/60 Hz.
    • Throughput: < 4 seconds / wafer / pick and place (transfer).
    • MTBF: 75,000 Hrs.

    Mounting Specifications:

    • Robot Hole Diameter: 8.500″
    • Robot Bolt Pattern: 3×1/4-20 on dia. 9.000″
    • End Effector: 4×4-40 on dia. 1.390″
    • Dead Zone: 25° Dead Zone
    • Canister: Minimum space required: 16.500″ Canister diameter: 8.000″