EQUIPE GEN2 SINGLE ARM WAFER HANDLING ROBOT

EQUIPE AXM 100 Series GENERATION 2

Highly functional, repeatable and dependable, Milara’s Second Generation (Gen2) of Equipe Atmospheric Robot (AXM 100) series are designed to bring existing Equipe customers a fresh update to an industry titan. Design efficiency is central to the outstanding performance of these systems. All motors, exposed belts and pulleys are located below the mounting plane which keeps particulate contamination to a minimum. Compact dimensions enable the robot to fit into smaller footprints and tighter configurations. The 100 Series is backed by Milara‘s unsurpassed expertise in developing advanced automation systems and software for the semiconductor industry.
Featuring New generation Low-Voltage AC Servo Motor with 23-bit absolute encoder allows extreme precision control, these large motors and smooth anti-backlash transmissions allow rapid movements with no sensitivity loss within the closed-loop DC servo system.
The AXM 100’s patented mechanical system has very few moving parts, and the flexible internal printed circuit boards have life expectancy of over 10 million cycles. These features, combined with a high ESD immunity tolerance, contribute to each unit’s high MTBF – greater than 75,000 hours.

Highly configurable for all applications
ATM robots are available with different radial reach capabilities. Standard arm links are 5.25″ per link, making total available reach equal to 10.50″ plus end-effector length. Suitable for applications where footprint and reach are to be minimized. When extra reach is required, links of 7.20″ are available. Z-axis vertical travel can be 7″, 10″ or 17″. Available options include multiple vacuum lines, cassette scanner, CE mark and S2-93 compliance.

EQUIPE AXM 400 Series GENERATION 2

Highly functional, repeatable and dependable, Milara’s Second Generation (Gen2) of Equipe Atmospheric Bottom Mount (ABM-400) and Equipe Atmospheric Top Mount (ATM-400) robots are designed to bring existing Equipe customers a fresh update to an industry titan. Our ISO 3 (ISO14644) / Class 1 (FED STD 209E) Clean room compliant wafer handling robots are designed to handle wafers up to 300mm in diameter. The ATM robot is mounted at the top flange, while the ABM’s base-mount design is ideal for use with our Linear Track. The 400 Series is backed by Milara‘s unsurpassed expertise in developing advanced automation systems and software for the semiconductor industry.
Featuring New generation Low-Voltage AC Servo Motor with 23-bit absolute encoder allows extreme precision control, these large motors and smooth anti-backlash transmissions allow rapid movements with no sensitivity loss within the closed-loop DC servo system.
The AXM 400’s patented mechanical system has very few moving parts, and the flexible internal printed circuit boards have life expectancy of over 10 million cycles. These features, combined with a high ESD immunity tolerance, contribute to each unit’s high MTBF – greater than 40,000 hours.

Highly configurable for all applications
ATM and ABM robots are available in a variety of configurations with a range of payload capacities, Z-axis vertical travel and radial reach capabilities. Standard arm links have total available reach equal to 10.50″ plus end-effector length. When extra reach is required, links of 7.2″ are available. The 5.20″ arm links are suitable for applications requiring minimized footprint and reach. New revisions to the arm links maximize stiffness for increased planarity under greater loads.

GEN2 intelligent controls
Each robot runs with the ESC-200 GEN2 Series Smart Controller, a fully programmable controller for wafer handling robots. The controller enables the user to supplement the standard command library with customized macro commands. The servo card utilizes “S” curve velocity profiling and high sampling frequency or better performance. Milara also offers versions of the AXM 100, ABM 400 and ATM 400 that are compatible with the hardware and software of most other robots on the market.