Equipe Wafer Handling Robot
Equipe Wafer Handling Robot
Equipe Wafer Handling Robot

EQUIPE DUAL ARM WAFER HANDLING ROBOT

Category:
Atmosphere Dual Arm Vertical Travel 13" CE Certificate TUV Certificate S2 Certificate S28 Certificate
  • ▶  Optimized for fast wafer swaps
  • ▶  Standard Integral horseshoe end effectors
  • ▶  Full 360° theta rotation eliminates dead zone

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    Additional Information

    General Specifications:

    • Payload (each arm) 1 lb. (.45kg)
    • Wafer Size: 200mm-300mm (Standard)
    • Weight: 90 lbs. (41kg)

    Utilities Required:

    • Vacuum: 18-24 inches Hg
    • Input Voltage: 100/120/220/240 VAC, 50/60 Hz.
    • Throughput: ≤ 3 seconds / per wafer swaps.

    Mounting Specifications:

    • Mounting Holes: 4 x .375” thru holes.
    • Mounting Holes: Spacing 11.75″.
    • End Effector Mounting: 4 x 6-32, 1.00” spacing
    • Dead Zone: N/A
    Axis Repeatability Speed Motion range (2406) Motion range (2407)
    T + 0.01 360°/sec 360° 360°
    R < ± 0.002″ 24 inch/sec 11.68” 14.50”
    Z ± 0.001″ 12 inch/sec 12.96″ 12.96″