Products - Category Diamond series

Showing 1 - 7 of 7
H5 Vacuum Wafer Handling Robot
H5 VACUUM WAFER HANDLING ROBOT
S2 Compliance KCs Certificate S8 Compliance S22 Compliance
  • ▶  Modular and highly customizable design
  • ▶  Arm length from 16” up to 20”
  • ▶  Optional teach pendant terminal
  • ▶  Powerful wafer handling firmware
  • E5 VACUUM ELEVATOR
    CE Certificate S2 Compliance UKCA Cetificate S8 Compliance
  • ▶  Excellent structural rigidity
  • ▶  Seamless integration with H5 vacuum robot
  • ▶  Vertical travel up to 14.48”
  • ▶  Powerful wafer handling firmware
  • H4 WAFER HANDLING ROBOT
    Atmosphere Dual Arm CE Certificate KCs Certificate
  • ▶  Modular and highly customizable design
  • ▶  Arm length from 10.50” up to 20”
  • ▶  Seamless integration with prealigner, linear track and other peripheral components.
  • ▶  Fully integrated motion controller, servo amplifiers and power supply.
  • H3 Milara Wafer Handling Robot
    H3 WAFER HANDLING ROBOT
    Atmosphere CE Certificate S2 Compliance KCs Certificate
  • ▶  Arm length from 10.50” up to 23.62”
  • ▶  High response brushless motors and precise zero-backlash
  • ▶  Modular and highly customizable design
  • ▶  Powerful wafer handling firmware
  • Milara H1 Wafer Handling Robot
    H1 WAFER HANDLING ROBOT
    Atmosphere CE Certificate S2 Compliance KCs Certificate
  • ▶  Modular and highly customizable design
  • ▶  Handling radial and in-line equipment placement
  • ▶  Arm length from 10.50” and 14.40”
  • ▶  Powerful wafer handling firmware
  • Wafer Handling Robot with Track
    H4 PLUS WAFER HANDLING ROBOT
    Atmosphere Dual Arm
  • ▶  Excellent structural rigidity
  • ▶  Modular and highly customizable design
  • ▶  Variety of End Effector options
  • Milara Reticle Robot
    RETICLE ROBOT
    Atmosphere Single Arm