Products - Feature Vacuum

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H5 Vacuum Wafer Handling Robot
H5 VACUUM WAFER HANDLING ROBOT
Category:
Robots > Diamond series
Vacuum Single Arm TUV Certificate S2 Certificate
  • ▶  Modular and highly customizable design
  • ▶  Harmonic Drive® gears
  • ▶  Optional teach pendant terminal
  • ▶  Powerful wafer handling firmware
    • E5 vacuum elevator
    E5 VACUUM ELEVATOR
    Category:
    Robots > Diamond series
    Vacuum CE Certificate TUV Certificate
  • ▶  Excellent structural rigidity
  • ▶  Seamless integration with H5 vacuum robot
  • ▶  Vertical travel up to 14.48”
  • ▶  Powerful wafer handling firmware

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    Wafer handling components

    Semiconductor EFEM

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    Contract manufacturing

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