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        H4 wafer handling robot
        Dual Arm Robots
        H3 Milara Wafer Handling Robot
        Single Arm Robots
        Milara Smart Prealigner 3" to 12"
        Prealigners
        H4 wafer handling robot
        Dual Arm Robots
        H3 Milara Wafer Handling Robot
        Single Arm Robots
        Milara Smart Prealigner 3" to 12"
        Prealigners
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        Wafer Sorter
        Milara Wafer Handler
        Wafer Handler
        Milara EFEM
        EFEM
        Milara Wafer Sorter
        Wafer Sorter
        Milara Wafer Handler
        Wafer Handler
        Milara EFEM
        EFEM
        Milara Wafer Sorter
        Wafer Sorter
        Milara Wafer Handler
        Wafer Handler
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Products - Feature Vacuum

Showing 1 - 2 of 2
H5 Vacuum Wafer Handling Robot
H5 VACUUM WAFER HANDLING ROBOT
Category:
Diamond series > Robots
KCs Certificate S2 Compliance S22 Compliance S8 Compliance
  • ▶  Modular and highly customizable design
  • ▶  Arm length from 16” up to 20”
  • ▶  Optional teach pendant terminal
  • ▶  Powerful wafer handling firmware
    • E5 vacuum elevator
    E5 VACUUM ELEVATOR
    Category:
    Diamond series > Robots
    CE Certificate S2 Compliance S8 Compliance UKCA Cetificate
  • ▶  Excellent structural rigidity
  • ▶  Seamless integration with H5 vacuum robot
  • ▶  Vertical travel up to 14.48”
  • ▶  Powerful wafer handling firmware