Products - Feature Vacuum

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H5 Vacuum Wafer Handling Robot
H5 VACUUM WAFER HANDLING ROBOT
Category:
Robots > Diamond series
Vacuum Single Arm TUV Certificate S2 Certificate
  • ▶  Modular and highly customizable design
  • ▶  Harmonic Drive® gears
  • ▶  Optional teach pendant terminal
  • ▶  Powerful wafer handling firmware

    • Products

    Wafer handling components

    Semiconductor EFEM

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    49 Maple St., Milford, MA 01757, USA

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