Products - Feature Single Arm

Showing 1 - 5 of 5
H5 Vacuum Wafer Handling Robot
H5 VACUUM WAFER HANDLING ROBOT
Category:
Robots > Diamond series
S2 Compliance KCs Certificate S8 Compliance S22 Compliance
  • ▶  Modular and highly customizable design
  • ▶  Arm length from 16” up to 20”
  • ▶  Optional teach pendant terminal
  • ▶  Powerful wafer handling firmware
    • H3 Milara Wafer Handling Robot
    H3 WAFER HANDLING ROBOT
    Category:
    Robots > Diamond series
    Atmosphere CE Certificate S2 Compliance KCs Certificate
  • ▶  Arm length from 10.50” up to 23.62”
  • ▶  High response brushless motors and precise zero-backlash
  • ▶  Modular and highly customizable design
  • ▶  Powerful wafer handling firmware
    • Milara H1 Wafer Handling Robot
    H1 WAFER HANDLING ROBOT
    Category:
    Robots > Diamond series
    Atmosphere CE Certificate S2 Compliance KCs Certificate
  • ▶  Modular and highly customizable design
  • ▶  Handling radial and in-line equipment placement
  • ▶  Arm length from 10.50” and 14.40”
  • ▶  Powerful wafer handling firmware
    • Equipe ATM 100 Single Arm Wafer Handling Robot
    EQUIPE GEN2 SINGLE ARM WAFER HANDLING ROBOT
    Category:
    Robots > Equipe series
    Atmosphere CE Certificate S2 Compliance S22 Compliance
  • ▶  Designed for handling wafers and reticles up to 300mm
  • ▶  Rrapid motion with no sensitivity loss
  • ▶  Free of backlash, providing highly repeatable positioning
    • Milara Reticle Robot
    RETICLE ROBOT
    Category:
    Robots > Diamond series
    Atmosphere Single Arm

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