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        H4 wafer handling robot
        Dual Arm Robots
        H3 Milara Wafer Handling Robot
        Single Arm Robots
        Milara Smart Prealigner 3" to 12"
        Prealigners
        H4 wafer handling robot
        Dual Arm Robots
        H3 Milara Wafer Handling Robot
        Single Arm Robots
        Milara Smart Prealigner 3" to 12"
        Prealigners
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        Wafer Sorter
        Milara Wafer Handler
        Wafer Handler
        Milara EFEM
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        Wafer Handler
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Products - Feature Single Arm

Showing 1 - 5 of 5
H5 Vacuum Wafer Handling Robot
H5 VACUUM WAFER HANDLING ROBOT
Category:
Diamond series > Robots
KCs Certificate S2 Compliance S22 Compliance S8 Compliance
  • ▶  Modular and highly customizable design
  • ▶  Arm length from 16” up to 20”
  • ▶  Optional teach pendant terminal
  • ▶  Powerful wafer handling firmware
    • H3 Milara Wafer Handling Robot
    H3 WAFER HANDLING ROBOT
    Category:
    Diamond series > Robots
    Atmosphere CE Certificate KCs Certificate S2 Compliance
  • ▶  Arm length from 10.50” up to 23.62”
  • ▶  High response brushless motors and precise zero-backlash
  • ▶  Modular and highly customizable design
  • ▶  Powerful wafer handling firmware
    • Milara H1 Wafer Handling Robot
    H1 WAFER HANDLING ROBOT
    Category:
    Diamond series > Robots
    Atmosphere CE Certificate KCs Certificate S2 Compliance
  • ▶  Modular and highly customizable design
  • ▶  Handling radial and in-line equipment placement
  • ▶  Arm length from 10.50” and 14.40”
  • ▶  Powerful wafer handling firmware
    • Equipe ATM 100 Single Arm Wafer Handling Robot
    EQUIPE GEN2 SINGLE ARM WAFER HANDLING ROBOT
    Category:
    Equipe series > Robots
    Atmosphere CE Certificate S2 Compliance S22 Compliance
  • ▶  Designed for handling wafers and reticles up to 300mm
  • ▶  Rrapid motion with no sensitivity loss
  • ▶  Free of backlash, providing highly repeatable positioning
    • Milara Reticle Robot
    RETICLE ROBOT
    Category:
    Diamond series > Robots
    Atmosphere Single Arm