Products - Feature Single Arm

Showing 1 - 5 of 5
H5 Vacuum Wafer Handling Robot
H5 VACUUM WAFER HANDLING ROBOT
Vacuum Single Arm TUV Certificate S2 Certificate
  • ▶  Modular and highly customizable design
  • ▶  Harmonic Drive® gears
  • ▶  Optional teach pendant terminal
  • ▶  Powerful wafer handling firmware
  • H3 Milara Wafer Handling Robot
    H3 WAFER HANDLING ROBOT
    Atmosphere Hot Wafers CE Certificate S2 Certificate
  • ▶  Arm length from 10.50” up to 24.00”
  • ▶  High response brushless motors and precise zero-backlash
  • ▶  Modular and highly customizable design
  • ▶  Powerful wafer handling firmware
  • Milara H1 Wafer Handling Robot
    H1 WAFER HANDLING ROBOT
    Atmosphere Hot Wafers CE Certificate S2 Certificate
  • ▶  Modular and highly customizable design
  • ▶  Handling radial and in-line equipment placement
  • ▶  Arm length from 10.50” and 14.40”
  • ▶  Powerful wafer handling firmware
  • Equipe Single Arm Robot
    EQUIPE SINGLE ARM WAFER HANDLING ROBOT
    Atmosphere CE Certificate S2 Certificate S28 Certificate
  • ▶  High ESD tolerance
  • ▶  Compact footprint
  • ▶  Highly repeatable positioning
  • Milara Reticle Robot
    RETICLE ROBOT
    Atmosphere CE Certificate S2 Certificate S28 Certificate
  • ▶  Feature
  • ▶  Feature
  • ▶  Feature