Hologram Wafer

Cutting-Edge Solutions for Semiconductor Manufacturing

OUR PRODUCTS

Explore Milara Inc.’s comprehensive range of wafer handling and automation products, designed to meet the highest standards of precision and efficiency in the semiconductor industry. From smart prealigners to advanced wafer handling robots, our products are engineered to enhance your manufacturing process with innovative technology and unmatched reliability.

Hologram EFEM 300mm
hologram base
hologram base
H3 Robot Hologram
hologram base
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Milara Smart Prealigner 3" to 12"
MILARA SMART PREALIGNER 3" - 12"
Category:
Prealigners
Atmosphere CE Certificate S2 Compliance S8 Compliance
  • ▶  Industry leading alignment precision
  • ▶  Self-calibration and self-diagnostic
  • ▶  RGB and IR light sources for faster edge detection
  • ▶  Moving lighthouse
    • H5 Vacuum Wafer Handling Robot
    H5 VACUUM WAFER HANDLING ROBOT
    Category:
    Robots > Diamond series
    S2 Compliance KCs Certificate S8 Compliance S22 Compliance
  • ▶  Modular and highly customizable design
  • ▶  Arm length from 16” up to 20”
  • ▶  Optional teach pendant terminal
  • ▶  Powerful wafer handling firmware
    • E5 vacuum elevator
    E5 VACUUM ELEVATOR
    Category:
    Robots > Diamond series
    CE Certificate S2 Compliance UKCA Cetificate S8 Compliance
  • ▶  Excellent structural rigidity
  • ▶  Seamless integration with H5 vacuum robot
  • ▶  Vertical travel up to 14.48”
  • ▶  Powerful wafer handling firmware
    • H4 wafer handling robot
    H4 WAFER HANDLING ROBOT
    Category:
    Robots > Diamond series
    Atmosphere Dual Arm CE Certificate KCs Certificate
  • ▶  Modular and highly customizable design
  • ▶  Arm length from 10.50” up to 20”
  • ▶  Seamless integration with prealigner, linear track and other peripheral components.
  • ▶  Fully integrated motion controller, servo amplifiers and power supply.
    • H3 Milara Wafer Handling Robot
    H3 WAFER HANDLING ROBOT
    Category:
    Robots > Diamond series
    Atmosphere CE Certificate S2 Compliance KCs Certificate
  • ▶  Arm length from 10.50” up to 23.62”
  • ▶  High response brushless motors and precise zero-backlash
  • ▶  Modular and highly customizable design
  • ▶  Powerful wafer handling firmware
    • Milara H1 Wafer Handling Robot
    H1 WAFER HANDLING ROBOT
    Category:
    Robots > Diamond series
    Atmosphere CE Certificate S2 Compliance KCs Certificate
  • ▶  Modular and highly customizable design
  • ▶  Handling radial and in-line equipment placement
  • ▶  Arm length from 10.50” and 14.40”
  • ▶  Powerful wafer handling firmware
    • Equipe GEN2 ESC 200 Controller
    EQUIPE GEN2 CONTROLLER ESC 200 SERIES
    Category:
    Robots > Equipe series
    CE Certificate S2 Compliance S8 Compliance S22 Compliance
  • ▶  Optimized for fast wafer swaps.
  • ▶  Minimizes host system interaction to speed throughput.
  • ▶  “S-Curve” motion profiles provide smooth, fast wafer transfers and increased robot life.
    • Wafer Handling Robot with Track
    H4 PLUS WAFER HANDLING ROBOT
    Category:
    Robots > Diamond series
    Atmosphere Dual Arm
  • ▶  Excellent structural rigidity
  • ▶  Modular and highly customizable design
  • ▶  Variety of End Effector options
    • Equipe ATM 100 Single Arm Wafer Handling Robot
    EQUIPE GEN2 SINGLE ARM WAFER HANDLING ROBOT
    Category:
    Robots > Equipe series
    Atmosphere CE Certificate S2 Compliance S22 Compliance
  • ▶  Designed for handling wafers and reticles up to 300mm
  • ▶  Rrapid motion with no sensitivity loss
  • ▶  Free of backlash, providing highly repeatable positioning
    • Equipe Wafer Handling Robot
    EQUIPE DUAL ARM WAFER HANDLING ROBOT
    Category:
    Robots > Equipe series
    Atmosphere Dual Arm CE Certificate S2 Compliance
  • ▶  Optimized for fast wafer swaps
  • ▶  Standard Integral horseshoe end effectors
  • ▶  Full 360° theta rotation eliminates dead zone
    • Milara Reticle Robot
    RETICLE ROBOT
    Category:
    Robots > Diamond series
    Atmosphere Single Arm
    Milara Wafer Handler
    SMALL WAFER SYSTEMS (WAFER HANDLERS)
    Category:
    Small wafer system
  • ▶  Highly customizable design for meeting all your production needs
  • ▶  Small form factor to minimize the footprint
  • ▶  Low cost of ownership with high ROI
  • ▶  Integrated design for easy setup and installation
    • Milara Wafer Sorter
    WAFER SORTERS
    Category:
    Sorters
  • ▶  Unparalleled throughput of up to 720 wafers per hour
  • ▶  Processing of up to 24 carriers simultaneously
  • ▶  Modular design ensuring independence from any type of wafer processing
    • Milara EFEM
    EFEM MODULES FOR SEMICONDUCTOR MANUFACTURING
    Category:
    EFEM
  • ▶  One to five 300mm Load Port configuration and/or up to 24 open cassettes for 50mm-200mm wafers
  • ▶  EFEM can be configured as a "bridge tool" for FOUPs and open cassettes of various sizes.
  • ▶  Modular design with vibration isolation, ensuring independency from any type of wafer processing, inspection and measurment.
    • Custom wafer handler
    CUSTOM WAFER HANDLING SYSTEMS
    Category:
    Custom wafer handlers
  • ▶  Custom Design and Engineering
  • ▶  Advanced Automation
  • ▶  Reliable and field-proven components